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Microlithography : process tec...
Elliottt, David J
Microlithography : process technology for IC fabrication / / David J. Elliott.
Elliottt, David J
GMDText
LanguageEng
Classification621.38173 El58
PublisherNew York, McGraw-Hill, c1986
SubjectLithography.Photoresists.
Descriptionxix, 378 p. : ill. ; 24 cm.

Notes

Includes bibliographical references and index.
No.
Barcode
Branch
Location
Call No.
Status
Due Date
1
041451
LIBRARY
LIBRARY
621.38173 El58
Available
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